Center for Analysis and Evaulation aims to construct and provide a platform capable of measuring, analyzing, and interpreting the structure and components of materials from bulk to atomic units. It carries out analysis services and analysis technology development through structure analysis, surface analysis, and product and defect analysis (device analysis) groups.
The Microstructural Analysis Group provides analysis services by establishing equipment that can analyze ultra-precision specimen production, micro nanostructure analysis, composition analysis, crystal structure, atomic arrangement analysis, and dynamic changes in material formation in situ.
Main Equipment: Cs-STEM, 4 TEMs(including in-situ TEM,), 4 FIBs, 6 SEMs, etc.
The Surface Analysis Group provides services for elemental composition and composition analysis, dopant and trace element analysis, 1D/2D/3D distribution analysis of elements, surface shape and electronic properties, and analysis of chemical bonding states and molecular structures.
Main Equipment: M-SIMS(Total 2), TOF-SIMS, XPS(Total 2), XRD, APT, AFM (including 300mm AFM), Raman and FT-IR equipment, etc.
The Product Analysis (Device Process Analysis) Group performs analysis services to identify the cause of defective products for quality improvement, and IP analysis services for benchmarking and patent analysis of advanced products through reverse engineering of semiconductor products.
Main Equipment: ALIBD, RIE, Wet station, Auto stage microscope, PCM, etc.
As a KOLAS accredited testing institution, we provide international accredited test certificate issuance services in a total of 13 items in the fields of mechanical testing, chemical testing, and electrical testing.
Main Equipment: Mechanical testing (Optical Microscope (OM), Scanning Electron Microscope (SEM), Transmission Electron Microscope (TEM)), Chemical testing (Secondary Ion Mass Spectrometer (SIMS)), Electrical testing (4-point probe)