AlN Thin Film-based MEMS Process Platform
This is an ultrasonic transducer/resonator-based sensor platform utilizing the piezoelectric properties of C-axis oriented AlN thin films.
The National Nanofab Center has the capability to provide AlN-based thin film MEMS process technology, and services can be provided at the following scope and technology level.
: Support for the development of 200 mm SOI WAFER-based thin film AlN MEMS start-up products