National Nanofab Center Ministry of Science and ICT KAIST

Micro Battery - Micro Solid-State Battery

The micro solid-state battery technology utilizes semiconductor processes to manufacture high-density, high-performance solid-state batteries through ultra-thin electrode structure control. It offers precise analysis and evaluation techniques for this process. It provides future next-generation battery technology that combines semiconductor processes and battery technology.

• Metal electrode process: Helps to exhibit fast charging and discharging characteristics by patterning the metal thin film used as a current collector.
• Positive electrode process: Shape control is possible through deposition/patterning of positive electrode materials including lithium oxide compounds.
• Solid electrolyte process: Improves ion conductivity by controlling the thickness to nanometer size using sputtering and ALD processes for solid electrolytes.
• Negative electrode process: Various negative electrode materials such as lithium metal, silicon, and tin can be applied by thin film processing.
• Packaging process: Ensures battery operation stability through the application of packaging materials for the stable operation of micro solid-state batteries.
• Interface control process: Helps improve battery characteristics by enhancing interface adhesion through surface treatment.
• Analysis/Evaluation process: Supports accurate device characteristic evaluation by applying analysis processes and evaluation techniques suitable for micro solid-state batteries.

• Fine pattern process: Can provide high performance and efficiency by reducing the size of energy devices using semiconductor processes.
• High integration: Can integrate energy devices with higher energy density into chips through the manufacture of multilayer energy devices using semiconductor processes.
• Battery material control: Easy to control battery characteristics such as energy density, output characteristics, and charging/discharging characteristics by controlling material composition.
• Reliability: Easy to improve yield and provide reliability through process technology with high reproducibility and device evaluation.

Micro solid-state batteries can be mounted on semiconductor chips as ultra-small energy devices and can be applied in various fields such as bio, sensors, wearable electronic devices, etc.

The National Nanofab Center can provide ultra-small energy storage device manufacturing processes and analysis/evaluation processes, and can support manufacturing in desired shapes and sizes through user-customized services.