Overview < Introduction < About NNFC < National Nanofab Center

Date of establishment

2004.05.04
※ Basis of Establishment: Nanotechnology Development Promotion Act (Article 11)

Purpose of establishment

R&D support through joint use of facilities and equipment,
Commercialization of Research Results and Support for Small and Venture Companies

Main functions
- Support for joint use and utilization of R&D facilities and equipment related to nanotechnology in industry, academia, and research
- Support for process and application research and development to create new nano-convergence industries
- Training professionals using advanced equipment and facilities
- Commercialization of Research Results and Support for Small and Medium Business Start-ups
Achievements of Research and Development Support
- Joint development of World's smallest 3nm FinFET (Nano Electronic Device) ('06.3)
- Joint development of next-generation fusion memory (U-RAM) ('08.7)
- Joint development of the world's first 3DIC commercialization technology ('08.8)
- Joint development of the world's first 20nm gap integrated nano-device ('09.12)
- Joint development of 50nm Spectroscopic Sensor ('10.12)
Platform Technology
- CMOS Platform : 0.18um SOI RF
- MEMS Platform : Sa-FPA
  (Semi-active Focal Plane Array)
- More than Moore Platform : HSoS
  (Heterogeneous Systems On Silicon)
- NBIT Platform : u-TAS(Micro-Total Analysis System)