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0.18㎛ Technology
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Intelligent semiconductor
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MEMS in vitro diagnostic biosensor
Healthcare device
USB (User Switchable Biosensor) packaging
Next-generation sensor manufacturing platform
Thick MEMS
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Etch
300mm Conductor Etcher
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Lam research
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Kiyo45 X3Ch, Strip45 X1Ch
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AEP10
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Lam research
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EOX30
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MSE70
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TESCAN
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MAGNA GMU
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MSE60
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Field Emission Scanning Electron Microscope
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HITACHI
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S-4800 (2)
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MSE50
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Structural analysis
Ultra-high Resolution Field Emission Scanning Electron Microscope
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HITACHI
Model
SU8230
Id
MSE40
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Bioanalysis
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Molecular Devices
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SpectraMaxi3x
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BES10
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