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180nm Technology
130nm Technology
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Next-generation sensor manufacturing platform
Thick MEMS
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Diffusion
Furnace (Oxidation & Anneal)
Maker
Centrotherm
Model
E1500HT
Id
NOX50
View
Diffusion
LPCVD
Maker
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Model
PF-82
Id
NNT20
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Diffusion
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E1200
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AMAT
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21FCDIT-LTT-02
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DLA10
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Medium Current Ion Implanter
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VIISTA 900XP
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DIM30
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Diffusion
MEMS Wet Station
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HIT
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HWB-MCP8
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NWS11,NWS22
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