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In-line Measurements
Automated Thickness Measurement System
Maker
KLA-Tencor
Model
SFX-100
Id
MTM40
View
In-line Measurements
Spectroscopic Ellipsometer
Maker
Woollam
Model
M-2000DI
Id
MTM30
View
In-line Measurements
Spectroscopic Reflectometer
Maker
K-MAC
Model
ST-5000
Id
MTM10/20/60
View
In-line Measurements
Stress Gauge
Maker
FSM
Model
FSM-500tc
Id
MSM10
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In-line Measurements
Surface Profiler
Maker
Bruker
Model
Dektak 8, XT
Id
MPF20, 50
View
In-line Measurements
4-Point Probe
Maker
4D
Model
280DI
Id
MFP20
View
In-line Measurements
4-Point Probe
Maker
AIT
Model
CMT-SR2000N
Id
MFP10 / 30
View
In-line Measurements
Automated Thickness Measurement System
Maker
KLA-Tencor
Model
SFX-200
Id
ATM10
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1