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National Nanofab Center

national nanofab center

Thin Film

Thin Film
8-inch
8-inch

Technical Features

PECVD

SiO2, SiN, SiON, TEOS, BPSG(BSG, PSG), a-Si, ACL

HDPCVD

STI, ILD, IMD USG

Sputter

Al & Cu Metal Interconnection, Multi-Target Sputter & Evaporator

Tungsten(W) CVD Plugging

Electroplating – Cu, NiCo...

ALD

Al2O3, HfO2, ZrO2, TiO2, Ta2O5 @ High-k Materials

SiO2, TiN @ Dielectric and Metal

Sawing & Die Separator

Stealth Laser Dicer & Blade Dicer