PECVD
SiO2, SiN, SiON, TEOS, BPSG(BSG, PSG), a-Si, ACL
HDPCVD
STI, ILD, IMD USG
Sputter
Al & Cu Metal Interconnection, Multi-Target Sputter & Evaporator
Tungsten(W) CVD Plugging
Electroplating – Cu, NiCo...
ALD
Al2O3, HfO2, ZrO2, TiO2, Ta2O5 @ High-k Materials
SiO2, TiN @ Dielectric and Metal
Sawing & Die Separator
Stealth Laser Dicer & Blade Dicer
If you wish to use materials that do not have the public domain attached, please use them after prior consultation with the person in charge of the NATIONAL NANOFAB CENTER website.