박막(Thin Film)
박막(Thin Film)
8-inch
8인치
기술적 특징
PECVD
SiO2, SiN, SiON, TEOS, BPSG(BSG, PSG), a-Si, ACL
HDPCVD
STI, ILD, IMD USG
Sputter
Al & Cu Metal Interconnection, Multi-Target Sputter & Evaporator
Tungsten(W) CVD Plugging
Electroplating – Cu, NiCo...
ALD
Al2O3, HfO2, ZrO2, TiO2, Ta2O5 @ High-k Materials
SiO2, TiN @ Dielectric and Metal
Sawing & Die Separator
Stealth Laser Dicer & Blade Dicer